Numerical simulation and optimization of cooling flow field of cylindrical cathode with annular magnetic field
Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode: Journal of Applied Physics: Vol 125, No 6
Comparative study of discharge characteristics and associated film growth for post-cathode and inverted cylindrical magnetron sputtering | SpringerLink
Magnetron sputter process for inner cylinder coatings - ScienceDirect
Sputtering Sources
Kurt J. Lesker Company | R&D Magnetron Sputtering Sources Overview | Enabling Technology for a Better World
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Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system - Kang-Yul Bae, Young-Soo Yang, Bum-Ho Choi, 2013
Diagnostics of Magnetron Sputtering Discharges by Resonant Absorption Spectroscopy | IntechOpen
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